Thick Ag Process

Thick Ag Process The Thick Ag Process heats up a desired evaporation target with electron beams in a high-vacuum environment to adhere vaporized targets to the heated surface of the wafer.

What ProPowertek can do for you?

ProPowertek provides customersThick Ag Process of 10um~15um or even up to 40um with evaporators.

Thick Ag Process

Feed wafers into evaporator after successful IQC with slugs in compliance with types and thicknesses given by the customer; perform Metal Evaporation Deposition and thickness measurement before OQC.

The Superiority of ProPowertek

  • The evaporator provided by ProPowertek may come up with Ag up to 40um thick, which is the no.1 thickness among the industry.
  • Using dual cryo-pumps to provide the high-vacuum environment for metal growth.
  • Various target options, tailor-made targets available on demand
  • A team of engineers with diversified experts including front end wafer foundry, wafer thinning and backend packaging house, knowledgeable and experienced in process integration and analysis in phases from front through middle to back and well-prepared to assist customers in accelerated development, troubleshooting, and mass production stabilization

 

Case Sharing

Thick Ag Process

After being deposited with Ti / Ni / Ag / Ni, a cross-section measurement suggests the Ag thickness has reached to 13.16um

After being deposited with Ti / Ni / Ag / Ni, a cross-section measurement suggests the Ag thickness has reached to 13.16um

 

Application

  • Existing thickness options: 10~20um in mass production now, with thickness subject to customer requirements; 25~40um thickness in development, development and verification subject to customer requirements
  • The above can be also applied to the thick copper process.
  • Applicable to 8"/6" P- or N-type wafers.
  • An optimum combination when aligned with Taiko Wafer to reduce warpage.

Mr. Hsieh / Felipe
Tel: +886-3-579-9209#5802
email: contact@propowertek.com

Send us a message

Hi, if you have any inquiries or suggestions, please call us on +886-3-579-9209 or use the below form to leave your message. We will respond as promptly as we can.